Nanoindenters for Nanoindentation Hardness Testing

Nanoindenters for Nanoindentation Hardness Testing

Nanomechanical testers from KLA Instruments provide precise, reliable and repeatable measurements of hardness, Young’s modulus, and other mechanical properties to help you explore new materials, reduce product failures and accelerate your time-to-market. KLA Instruments nanoindentation testing tools range from easy-to-use nanoindentation instruments to a high performance nanoindenter tester to the industry’s highest performance and most versatile nano tensile tester.

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EPFL – MicroNanoFabrication Annual Review Meeting

KLA is exhibiting at EPFL – MicroNanoFabrication Annual Review Meeting. We invite you to visit our booth to learn more about our nanoindenter systems.

Event Date May 13, 2025
Location SwissTech Convention Center, Ecublens, Switzerland
iMicro Nanoindenter

iMicro Nanoindenter

Flexible, user-friendly nanoindenter for modulus, hardness (Oliver-Pharr analysis, ISO 14577), storage and loss modulus, and universal testing. The iMicro nanoindentation hardness testing instrument is capable of exerting up to 1N of force to test hard materials at higher loads and larger depths. The nanoindentation instrument is fitted with optional actuators for testing of soft materials, tribology, lateral force and other measurements requiring the determination of force and displacement along two axes.

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Nano Indenter G200X Nanoindenter

Nano Indenter® G200X Nanoindenter

Industry-leading nanoindenter with a flexible, user-friendly interface for nanoscale mechanical testing. The Nano Indenter G200X uses high-speed controller electronics, an upgraded user interface and advanced InView software to enable a variety of optional advanced nanoindentation application modules: frequency-specific testing, quantitative scratch and wear testing, integrated probe-based imaging, high-temperature testing and custom test protocols.

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iNano Nanoindenter

iNano® Nanoindenter

Flexible, user-friendly, low-force nanoindenter that can perform a wide range of nanomechanical tests on metals, ceramics, composites, thin films, coatings, polymers, biomaterials and gels. The accurate nanoindentation instrument is capable of exerting up to 50mN force to test thin films and soft materials.

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NanoFlip Nanoindenter

NanoFlip Nanomechanical Tester

Compact, flexible in situ nanomechanical tester for in situ nanoindentation testing inside scanning electron microscopes or gloveboxes or on benchtops. The nanoindenter measures hardness, stiffness and other nanomechanical tests under both vacuum and ambient conditions.

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Looking for thin-film optical metrology?

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Technical Literature

Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.

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Timeline of Nanoindentation Innovation

The field of nanoindentation was co-founded by KLA’s Dr. Warren Oliver over 40 years ago, and KLA Instruments has continued to foster a culture of innovation. From releasing the first nanoindenter in the market to expanding nanoindentation technology into fast, high-temperature and high strain rate testing, we have continued to develop new static and dynamic measurement types, driving forward the next generation of nanomechanical testing of material hardness.

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Instruments

For industry experts, academics and other innovators, KLA Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world’s breakthrough technologies.

thin-film reflectometers

Filmetrics® Thin-Film Thickness Measurement Systems

The Filmetrics® thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, for both benchtop and production environments.

Filmetrics® Sheet Resistance Measurement Systems

The Filmetrics® benchtop and automated sheet resistance mapping instruments have been developed using decades of resistance measurement innovation and technical expertise.

Profilm3D Optical Profilometer

Filmetrics® and Zeta™ Optical Profilers

The Filmetrics® Profilm3D® and Zeta optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot™ measurement techniques for R&D and production environments.

Stylus profilometer

Stylus Profilers

The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

defect inspection system

Specialized Defect Inspectors

The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.

 

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