Thin-Film Thickness Measurement Systems
Thin-Film Thickness Measurement Systems
The Filmetrics® range of affordable reflectometers deliver high-precision thin-film thickness measurements in seconds. These easy-to-use thickness measurement tools, combined with intelligent software and a broad range of accessories and configurations, provide maximum versatility in film thickness measurements ranging from 1nm to 3mm.
Upcoming Event
View AllMaterials Research Society (MRS) Fall Meeting
KLA is excited to be returning as an exhibitor at the Materials Research Society®(MRS) Fall Meeting.We invite you to visit our experts at booth #503 to learn more about the KLA Instruments product portfolio, including contact and
| Event Date | December 3 - 5, 2024 |
| Location | Hynes Convention Center, Boston, Massachusetts |
| Booth | #503 |
Filmetrics® F10-AR Coating Measurement Instrument
Designed for simple, affordable measurement of ophthalmic anti-reflection coatings and hardcoat thickness measurements. The thin-film measurement system's exclusive probe design rejects 98% of backside reflections on substrates 1.5mm thick, and rejects even more on thicker lenses.
Filmetrics® F10-ARc Portable Reflectometer
Portable reflectometer with internal fiber optics to measure curved surfaces including anti-reflection coatings with a patented long-life, low-power light source. Get color, reflectance, and film thickness measurements in seconds at a fraction of the price.
Filmetrics® F10-HC Thickness Measurement Instrument
Relied on by automotive hardcoat companies around the world to measure hardcoat thickness on flat and curved surfaces. The F10-HC is based on the F20 platform where analysis of spectral reflectance data provides film thickness measurement results quickly.
Filmetrics® F10-RT Reflectometer
Performs simultaneous measurement of reflectance and transmittance; supports calculations of film thickness and refractive index.
Filmetrics® F20 Film Thickness Measurement Instruments
Versatile, affordable general-purpose film thickness and refractive index measurement system.
Filmetrics® F3-sX Film Thickness Measurement System Series
Utilizes near infra-red (NIR) light for the thickness measurement of semiconducting and dielectric layers up to 3mm thick.
Filmetrics® F3-CS Measurement System
Small, portable tool designed for the measurement of coating thickness on small witness samples, such as parylene-coated coupons. Film thickness results are presented in real-time on an intuitive measurement results display.
Filmetrics® F30 Thickness Measurement Instrument Series
Provides in situ, real-time measurement of deposition rate, film thickness, and optical constants (n and k) for the analysis of film uniformity and composition of semiconductor and dielectric layers.
Filmetrics® F32 In-Line Thickness Measurement System
Measures deposition rate, film thickness, optical constants and uniformity in real time, with the capability to measure up to 4 spots simultaneously.
Filmetrics® F40 Film Thickness Measurement Instrument
Includes an integrated live video camera, coupled with microscope optics to produce a film thickness measurement spot size as small as 1µm, for the measurement of patterned, curved, and non-uniform samples.
Filmetrics® F50 Film Thickness Measurement Mapping Instrument
Uses an automated R-Theta stage for rapid, automatic film thickness mapping of wafer sizes up to 300mm as quickly as 0.5 seconds per site. The Filmetrics® F50 family of products can map film thickness as quickly as two points per second.
Filmetrics® F54 Film Thickness Measurement Mapping Instrument
Combines the small measurement spot size of the F40 with an integrated camera, plus automatic mapping of wafers up to 300mm in diameter, using an R-Theta stage. Thin-film thickness of samples up to 450mm in diameter are mapped quickly and easily with the F54 advanced spectral reflectance system.
Filmetrics® F54-XY-200 Film Thickness Measurement Mapping Instrument
The F54-XY Series are automated benchtop mapping systems for measuring film thickness, refractive index, reflectance, absorption, and surface roughness for samples up to 300mm round. Five configurations cover film thickness from 4nm up to 120µm, with spot size from 2µm to 100µm.
Filmetrics® F60-c Film Thickness Mapping Instrument for Production Environments
The F60-c is a fully-automated cassette-to-cassette metrology system for measuring film thickness on unpatterned production and monitor wafers. Seven configurations cover film thickness from 5nm up to 2mm.
Filmetrics® F60-t Film Thickness Mapping Instrument for Production Environments
Brings film thickness and index measurement to a production environment with automatic notch finding, automatic on-board baselining, and SECS/GEM factory automation software. Different F60-t instruments are distinguished primarily by thickness measurement and wavelength range.
Looking for ellipsometer thin-film thickness tools for semiconductor chip manufacturing?
View MoreTechnical Literature
Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.
Timeline of Innovation
Starting with the launch of the first thin-film measurement instrument in 1995, Filmetrics technical experts have continued to produce key innovations such as AutoBaseline™, pattern recognition using the film thickness image, and built-in automatic wavelength calibration. For over two decades, the innovative technology and unparalleled application support offered by Filmetrics has provided customers with repeatable and trustworthy measurements for thin-film metrology. Learn more about the rich history of innovation and see why Filmetrics reflectometers are the standard in thin-film measurement.
Receive the latest KLA Instruments news, papers, events, and more
Follow KLA Instruments
Follow KLA Instruments to engage with our experts and learn about our tool applications.
Learn how our products can help you.
Explore More Solutions
Instruments
For industry experts, academics and other innovators, KLA Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world’s breakthrough technologies.
Defect Inspectors
The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.
Sheet Resistance Measurement
The Filmetrics® sheet resistance mapping instruments have been developed based on over 45 years of resistance measurement innovation and technical expertise in metrology tools.
Nanoindenters
The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.
Optical Profilers
The Profilm3D® and Zeta™ optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements; metrology tools leveraging interferometer and ZDot™ measurement techniques.
Stylus Profilers
The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.