Certified & Remanufactured
Defect Inspection
Surfscan® Series
Unpatterned Wafer Defect Inspection Systems
The Surfscan® unpatterned wafer inspection systems identify defects and surface quality issues that affect the performance and reliability of semiconductor devices. It supports IC, OEM, materials and wafer manufacturing by qualifying and monitoring tools, processes and materials, by quickly isolating surface defects.
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Surfscan SP2XP:
Unpatterned wafer inspection system targeted for technologies ≥ 45nm design node.
Download brochure.Surfscan SP2:
Unpatterned wafer inspection system targeted for technologies ≥ 65nm design node.
Download brochure.Surfscan SP1DLS Pro:
Unpatterned wafer inspection system targeted for technologies ≥ 90nm design node.
Download brochure.Surfscan SP1TBI Pro:
Unpatterned wafer inspection system targeted for technologies ≥ 130nm design node.
Download brochure.2835, 2367 Pro
Broadband Plasma Patterned Wafer Defect Inspection Systems
The 2835 and 2367 Pro broadband plasma defect inspection systems provide industry proven performance for optical patterned defect inspection, enabling discovery and monitoring of yield-critical defects on ≥ 45nm logic, memory and specialty devices. Each model is uniquely equipped with selectable wavelength illumination, imaging pixels, optic modes and advanced algorithms for noise suppression and defect separation to provide cost-effective, inline inspection control for your most critical levels.
Related Products
2835:
Patterned wafer inspection system with broadband DUV-UV-Visible spectrum targeted for ≥45nm design nodes.
Download brochure.2367 Pro:
Patterned wafer inspection system with broadband UV-Visible spectrum targeted for ≥65nm design nodes.
Download brochure.KLA has a comprehensive portfolio of defect inspection and review systems for advanced chip manufacturing, including additional Surfscan® unpatterned wafer inspection systems and broadband plasma optical patterned wafer inspectors.
Certified & Remanufactured