Measurement Solutions for Solar Devices

3D Optical Profilometer Metrology for High Resolution Measurement of Solar Cell Texture, Busbars, Bond Pads and Finger Lines.

High resolution solar cell texture measured by the Zeta-20HR.
High resolution solar cell texture measured by the Zeta-20HR.
High resolution Zeta-20HR profile of the pyramidal solar cell texture compared to both AFM and SEM profiles.
High resolution Zeta-20HR profile of the pyramidal solar cell texture compared to both AFM and SEM profiles.

Solar Cell Texture Measurement

Problem: The performance of the solar cell is degraded due to nonuniform texture and out-of-spec surface roughness.

Solution: The KLA Instruments™ Zeta™-20HR 3D optical profiler quickly and easily measures 3D surface roughness and provides a topographic measurement of the textured surface. Texture may be quantified by various area and volume parameters, including 3D roughness, and the same measurement produces detailed visuals of the structure itself.

3D silver finger line measured by the Zeta-Solar optical profiler
3D silver finger line measured by the Zeta-Solar optical profiler.
3D silver finger line measured by the Zeta-Solar with automatic analysis and pass/fail results.
3D silver finger line measured by the Zeta-Solar with automatic analysis and pass/fail results.
3D bond pad measured by the Zeta-Solar, with automated measurement of bond pad height.
3D bond pad measured by the Zeta-Solar, with automated measurement of bond pad height.

Busbar, Bond Pad and Finger Line Measurement

Problem: Busbar, bond pad and finger line dimensional characterization are critical to ensure uniform conductivity of the DC current generated by the solar cells.

Solution: The Zeta-Solar 3D optical microscope simultaneously measures line width, height and structural uniformity of bond pads, finger and bus lines, which are important metrics in solar cell manufacturing due to the impact on cell performance. The Zeta-Solar delivers the capability to measure both high reflectivity (lines and pads) and low reflectivity (texture) surfaces in a single field of view.

Want to learn more about how the new Zeta-Solar and Zeta-20HR 3D optical profilometers can deliver high resolution data for your solar cell processes? Download a free brochure.

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