Thin film failure
mechanisms quantified with nanoindentation from KLA.
Strain-induced thin film failure characterization via scratch testing.
Interface adhesion energy indentation measurements on low k films.
Want to learn more about nanoindentation techniques for thin films and coatings? Download the latest Application Note for KLA Nano Indenter® systems.
- Precise nanoindenter and scratch measurements on thin films and coatings from micro to nano range of loads and displacements
- Measure substrate-independent elastic modulus of thin films and coatings using AccuFilm™ thin film analysis
- Fast indentation (1 indent/sec) and statistical analysis using NanoBlitz 3D for elastic modulus and stiffness mapping on thin films and coatings, including polymers, metals, semiconductor, low k dielectrics and more
- Tribology and scratch adhesion testing and analysis
- Ambient and in-situ nanoindentation systems for hardness testing based on the Oliver-Pharr technique
- Choose from an array of pre-programmed nanoindentation testing methods such as ISO 14577 hardness, Continuous Stiffness Measurement (CSM) and Dynamic Constant Strain Rate (CSR), or create customized nanoindentation test methods for your unique thin film material measurements
- Take advantage of high-temperature nanoindentation to evaluate creep and other thin film mechanical properties
- Access proprietary webinars taught by nanomechanical experts at KLA
- Not sure of what you need? Let us introduce you to KLA’s full suite of nano and microindentation systems – Nano Indenter® G200X, iNano®, iMicro, InSEM® HT and NanoFlip
