Schedule your
Zeta-20 optical profilometer demo today!
True Color infinite focus image
ZDot™ 3D step height
measurement
Discover the difference in your surface topography with our ZDot™ measurement technique: Produce True Color and 3D topography data in a single scan! Contact KLA for a demonstration of the Zeta-20 optical profilometer to see how it can meet your 3D surface profiler requirements.
- Use the proprietary ZDot™ measurement technique on the Zeta-20 for fast, non-contact 3D surface topography measurements.
- Do you have difficulty focusing on a transparent surface with your confocal optical profiler? Anybody can find focus on any surface with ease using ZDot™ focus assist.
- The capability of the KLA Zeta-20 is expanded with multi-mode optics adding interferometry, film thickness measurements, and automated defect inspection to the existing 3D, non-contact profilometer.
- The Zeta-20 is a versatile surface roughness measurement tool. Measure smooth surfaces using the interferometry capability and very rough surfaces using ZDot™ measurement technique.
- Measure a wide range of step heights, from small steps requiring fast, high resolution scans to deep, high aspect ratio trenches and vias.
Contact Us
- Fast, non-contact, 3D optical profiler with ZDot™ technology.
- The KLA Zeta-20 measures step heights from nanometers to millimeters, plus transparent film thickness measurements.
- With multi-mode optics, the Zeta-20 provides the 3D surface roughness measurement of smooth (sub-nanometer) and rough (hundreds of microns) surfaces.
- The Zeta-series optical profilers support R&D and production environments. Choose from the manual sample load of either the Zeta-20 and Zeta-300 or the fully automated wafer handling capability of the Zeta-388.
- Not finding what you are looking for? KLA offers a range of stylus and optical profilometers supporting step height and surface roughness measurements. Let our product experts help you find the right tool for your metrology requirements.
