Filmetrics® Thin-Film Thickness Measurement Systems
Filmetrics® Thin-Film Thickness Measurement Systems
The Filmetrics® F-Series reflectometers deliver high-precision thin-film thickness measurements in seconds. These easy-to-use, affordable thickness measurement tools, combined with intelligent software and a broad range of accessories and configurations, provide maximum versatility in film thickness measurements ranging from 1nm to 3mm.
Upcoming Event
View AllEPFL – MicroNanoFabrication Annual Review Meeting
KLA is exhibiting at EPFL – MicroNanoFabrication Annual Review Meeting. We invite you to visit our booth to learn more about our nanoindenter systems.
| Event Date | May 13, 2025 |
| Location | SwissTech Convention Center, Ecublens, Switzerland |
Single-Spot Thickness Measurement Systems
Benchtop systems for measuring film thickness and refractive index with a single mouse-click. Measure thicknesses from 1nm - 3mm - even within multilayer film stacks.
Filmetrics® F20 Series Film Thickness Measurement Instruments
Our most popular general-purpose benchtop film thickness and refractive index measurement system.
Filmetrics® F3-sX Film Thickness Measurement Series
Utilizes near infra-red (NIR) light for the thickness measurement of rough and less uniform semiconductor and dielectric layers up to 3mm thick.
Filmetrics® F3-CS Measurement System
Small, portable tool designed for the measurement of coating thickness on small witness samples, such as parylene-coated coupons.
Filmetrics® F10-ARc
Portable reflectometer with internal fiber optics to measure curved surfaces including anti-reflection coatings with a patented long-life, low-power light source. Get color, reflectance, and thin-film thickness measurements in seconds at a fraction of the price.
Filmetrics® F10-HC
Relied on by automotive hardcoat companies around the world to measure hardcoat thickness on flat and curved surfaces. The F10-HC is based on the F20 platform where analysis of spectral reflectance data provides thin-film thickness measurement results quickly.
Filmetrics® F10-AR
Measures reflectance of ophthalmic lenses and other curved surfaces. Options available for transmittance and hardcoat thickness measurement.
Filmetrics® F10-RT Reflectometer
Performs simultaneous measurement of reflectance and transmittance; supports calculations of film thickness and refractive index.
Download BrochureMicroscopic-Spot Thickness Measurement Systems
Film thickness measurement instrument used when a measurement spot as small as 1µm is required - use your own microscope or let us supply the entire measurement system.
Filmetrics® F40 Film Thickness Measurement Instrument
Attaches to your microscope to measure thickness and index in spots as small as 1µm in patterned, curved, and non-uniform samples.
Automated Thickness Mapping Systems
Automated system for mapping of film thickness and refractive index for nearly any sample shape.
Filmetrics® F50 Automated Film Thickness Mapper
Adds automated mapping capabilities to our F20 family of products. Map thickness and index as fast as two points per second.
Filmetrics® F54 Film Thickness Measurement Mapping Instrument
Maps thin-film thickness of samples up to 450mm in diameter as fast as two points per second.
Filmetrics® F54-XY-200 and F54-XY-300 Film Thickness Measurement Mapping Instruments
Maps thin-film thickness of patterned or unpatterned samples up to 200mm x 200mm, or up to 300mm round, as fast as two points per second.
Filmetrics® F60-t Film Thickness Mapping Instrument for Production Environments
Production-ready tabletop thickness mapping system includes on-board reflectance standard, notch finding, interlocked cover, and more.
Filmetrics® F60-c Film Thickness Mapping Instrument for Production Environments
Cassette-to-cassette version of the F60-t.
Inline Thickness Monitoring Systems
Monitor and control thickness of moving films during production. Sample rates as high as 100Hz are possible at multiple measurement locations.
Filmetrics® F30 Thickness Measurement Instrument Series
Monitors reflectance, thickness, and deposition rates during MOCVD, sputtering, and virtually any other deposition process.
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Filmetrics® F32 In-Line Thickness Measurement System
Measures deposition rate, film thickness, optical constants and uniformity in real time, with the capability to measure up to 4 spots simultaneously.
Technical Literature
Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.
Timeline of Innovation
Starting with the launch of the first thin-film measurement instrument in 1995, Filmetrics technical experts have continued to produce key innovations such as AutoBaseline™, pattern recognition using the film thickness image, and built-in automatic wavelength calibration. For over two decades, the innovative technology and unparalleled application support offered by Filmetrics has provided customers with repeatable and trustworthy measurements for thin-film metrology. Learn more about the rich history of innovation and see why Filmetrics reflectometers are the standard in thin-film measurement.
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