Product Description
The Candela 6300 series of optical surface analyzers harnesses patented multi-channel optics, combined with unique laser stability management technology, to deliver powerful optical surface metrology capabilities for edge roll-off, texture/polish uniformity, HDI characterization, and scratch and particle inspection. The optical surface inspection and metrology system’s leading-edge optical scanning technology enables full surface disk topography metrology in both radial and circumferential directions and allows manufacturers to use a single tool to measure the entire spatial spectrum. Increased laser power, a lower noise floor and new optics design eliminate the need for sputtering glass substrates for defect detection, allowing for identification of roughness variations of < 0.1Å.
Comparing 6300 optical surface analyzers with other surface metrology systems such as scatterometers or laser Doppler vibrometry systems, the 6300 series is the best optical surface metrology solution for radial and circumferential data, and fast, full-surface topography information on ultra-smooth substrate and media.
The 6300 series optical surface inspection and metrology system provides full-disk, non-contact coverage at a much lower cost of measurement than stylus profilers or atomic force microscopy (AFM) technologies.
Features
- Provides industry’s widest spatial bandwidth and lowest noise floor
- Measures circumferential, radial roughness and waviness
- Repeatable metrology correlates to AFM measurements on metal and glass media
- Provides fast and full-surface coverage on all disk form factors
- High sensitivity for faint scratches, stains and particle inspection
- Innovative Optical Surface Analysis (OSA) technology
- Available as manual (6310) or fully-automated (6340)
Use Cases
- Roughness and waviness analysis
- Defect inspection
- Scratch and ridge inspection
- Particle and stain inspection
- Microwaviness measurement
Options
- Precision diamond scribe
- Offline software
- Large form factor software license
