The Filmetrics® R54 Advanced Sheet Resistance Mapping System

Aug 13, 2024

Sheet resistance monitoring is critical to any industry that utilizes conductive films, including semiconductor and compound semiconductor manufacturing. The Filmetrics® R54-200 and R54-300 advanced sheet resistance mapping systems from KLA Instruments™ are optimized for metal film uniformity mapping, ion implant doping and anneal characterization, film thickness and resistivity mapping, and non-contact film thickness measurement with eddy current detection.

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