Building on industry-leading thin-film metrology expertise, the compact benchtop Filmetrics^® F54-XY delivers automated thin-film thickness mapping for patterned samples using spectral reflectometry. The F54-XY-200 and F54-XYT-300 configurations support measurement of patterned or unpatterned wafers up to 200/300mm diameter and are available in wavelength range configurations that cover 190-1700nm for a wide variety of film thickness applications.