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The Filmetrics® R50-4PP Sheet Resistance Mapping System
Aug 14, 2024The Filmetrics R50 sheet resistance mapper represents a culmination of over 45 years of sheet resistance technology leadership. Since the introduction of our first resistivity gauge in 1975, the KLA family of companies has revolutionized the measurement of both sheet resistance and thickness for conductive layers. The R50 capabilities are optimized for metal film uniformity mapping, ion doping and implant characterization, film thickness and resistivity mapping, and non-contact film thickness measurement, critical to any industry that utilizes conductive films, from semiconductor manufacturing to the flexible electronics required to enable wearable technology.