Product Description
KLA Instruments™ introduces the Zeta™-Solar, a new Zeta model that leverages advances in 3D imaging technology to simplify the imaging process and improve the cost of ownership to the highly competitive solar cell market. This optical profiler includes XY stage options to accommodate the latest generation solar cells up to 230mm x 230mm, as well as ½ cells and earlier generation solar cells. The Zeta-Solar software has been developed to seamlessly combine easy-to-use Profilm software with the well-established metallization measurements developed for other Zeta systems. Enhanced measurement mode analysis provides solar industry-specific metallization measurements and pass/fail output criteria.
Features
- Optimized height and width of finger and busbar measurements with statistical analysis and pass/fail identification
- High Dynamic Range (HDR) optimized for ultra-low reflectivity textures
- Automatic stitching for large Field of View (FOV) areas of busbars and contact pads
- Programmable sample motion stage for next generation 230mm x 230mm solar cell processes
- True Color imaging of 3D solar surfaces
- Industry-leading repeatability and reproducibility
Applications
- Metallization finger line metrology
- Metallization busbar metrology
- Metallization contact/bond pad metrology
- True Color imaging
