Products
Filmetrics® Thin-Film Thickness Measurement Systems
The Filmetrics® thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, for both benchtop and production environments.
Filmetrics® Sheet Resistance Measurement Systems
The Filmetrics® benchtop and automated sheet resistance mapping instruments have been developed using decades of resistance measurement innovation and technical expertise.
Filmetrics® and Zeta™ Optical Profilers
The Filmetrics® Profilm3D® and Zeta™ optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot™ measurement techniques for R&D and production environments.
Stylus Profilers
The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Nanoindenters
The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.
Specialized Defect Inspectors
The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.
Tools and Software
Filmetrics® Spectral Reflectance Calculator
Calculate reflectance caused by thin-film interference on up to 20 films using our popular reflectance calculator.
Filmetrics® Refractive Index Database
Search our comprehensive database for refractive index of common materials.
Filmetrics® Product Selection Guide
Use our product selection guide for additional guidance on choosing the right Filmetrics system.
Service
Service
The KLA Instruments service group offers a global network of fast, responsive and flexible support options to accommodate your unique needs and maximize your uptime.